| 型号 | 行程范围（mm） | 外形尺寸（mm） |
| 15.20.14 | 1500X2000X1350 | 2388X3280X4385 |
| 15.26.14 | 1500X2600X1350 | 2388X3880X4385 |
| 15.33.14 | 1500X3300X1350 | 2388X4580X4385 |
| 20.33.15 | 2000X3300X1500 | 2888X4580X4686 |
| 20.40.15 | 2000X4000X1500 | 2888X5240X4686 |
| 20.33.18 | 2000X3300X1800 | 2888X4580X5286 |
| 20.40.18 | 2000X4000X1800 | 2888X5240X5286 |
E0：自3.0 μm起
